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<http://www.wikidata.org/entity/Q1135970>	<http://www.wikidata.org/prop/direct/P279>	<http://www.wikidata.org/entity/Q35120> .
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<http://www.wikidata.org/entity/Q1135970>	<http://www.wikidata.org/prop/direct/P279>	<http://www.wikidata.org/entity/Q26907166> .
<http://www.wikidata.org/entity/Q1135970>	<http://www.w3.org/2000/01/rdf-schema#label>	"3 \u00B5m lithography process"@en .
<http://www.wikidata.org/entity/Q1135970>	<http://www.w3.org/2007/05/powder-s#describedby>	<https://covidontheweb.inria.fr:4443/about/id/entity/http/ns.inria.fr/covid19/graph/wikidata-named-entities-full> .
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